Browsing by Author "Sezgi, NA"
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Synthesis and characterization of boron carbide films by plasma-enhanced chemical vapor deposition
Eroglu, OD; Sezgi, NA; Ozbelge, HO; Durmazucar, HH (TAYLOR & FRANCIS INC, 2003)The plasma-enhanced chemical vapor deposition of boron carbide was investigated on quartz glass and alumina substrates from a gas mixture of BCl3, H-2, and CH4 in an inductively coupled plasma (ICP) medium produced by a ...